Ngakhale ma lasers othamanga kwambiri akhalapo kwazaka zambiri, ntchito zamafakitale zakula kwambiri m'zaka makumi awiri zapitazi. Mu 2019, mtengo wamsika wa ultrafastlaser zinthukukonza kunali pafupifupi US $ 460 miliyoni, ndikukula kwapachaka kwa 13%. Malo ogwiritsira ntchito kumene ma lasers a ultrafast agwiritsidwa ntchito bwino pokonza zipangizo zamafakitale akuphatikizapo kupanga photomask ndi kukonzanso m'makampani a semiconductor komanso silicon dicing, kudula magalasi / scribing ndi (indium tin oxide) kuchotsa filimu ya ITO pamagetsi ogula monga mafoni a m'manja ndi mapiritsi. , kutumiza ma piston kwa makampani opanga magalimoto, kupanga ma coronary stent ndi kupanga zida za microfluidic zamakampani azachipatala.
01 Kupanga ndi kukonza Photomask mumakampani a semiconductor
Ma lasers a Ultrafast adagwiritsidwa ntchito m'modzi mwazinthu zakale kwambiri zamafakitale pakukonza zida. IBM idanenanso za kugwiritsa ntchito femtosecond laser ablation pakupanga photomask mu 1990s. Poyerekeza ndi nanosecond laser ablation, yomwe imatha kutulutsa zitsulo zachitsulo ndi kuwonongeka kwa galasi, masks a laser a femtosecond amasonyeza kuti palibe zitsulo zachitsulo, zowonongeka magalasi, ndi zina zotero. Njirayi imagwiritsidwa ntchito popanga ma circuit Integrated (ICs). Kupanga chip IC kungafune mpaka 30 masks ndikuwononga> $100,000. Femtosecond laser processing imatha kukonza mizere ndi mfundo pansipa 150nm.
Chithunzi 1. Kupanga ndi kukonza ma photomask
Chithunzi 2. Zotsatira za kukhathamiritsa kwa mitundu yosiyanasiyana ya chigoba cha ultraviolet lithography kwambiri
02 Kudula silicon mumakampani a semiconductor
Silicon wafer dicing ndi njira yokhazikika yopangira makina a semiconductor ndipo nthawi zambiri amapangidwa pogwiritsa ntchito dicing wamakina. Mawilo odulirawa nthawi zambiri amakhala ndi ma microcracks ndipo ndi ovuta kudula (monga makulidwe <150 μm) zowonda. Kudula kwa laser kwa zowotcha zachitsulo zakhala zikugwiritsidwa ntchito mumakampani opanga zopangira zida zamagetsi kwazaka zambiri, makamaka zowonda zopyapyala (100-200μm), ndipo zimachitika pamasitepe angapo: laser grooving, kutsatiridwa ndi kulekanitsidwa kwamakina kapena kudula mozemba (ie infuraredi laser mtengo mkati. silicon scribing) kutsatiridwa ndi kupatukana kwa tepi yamakina. Laser ya nanosecond pulse imatha kukonza zowotcha 15 pa ola limodzi, ndipo laser ya picosecond imatha kukonza ma wafer 23 pa ola limodzi, ndi apamwamba kwambiri.
03 Kudula/kulemba magalasi mumakampani amagetsi ogwiritsidwa ntchito
Zowonera ndi magalasi oteteza mafoni am'manja ndi laputopu akucheperachepera ndipo mawonekedwe ena a geometric ndi opindika. Izi zimapangitsa kuti kudula makina azikhalidwe kukhala kovuta. Ma lasers odziwika bwino nthawi zambiri amatulutsa mawonekedwe osadulidwa bwino, makamaka magalasi akamangika magawo 3-4 ndipo magalasi odzitchinjiriza apamwamba a 700 μm amakhala otenthedwa, omwe amatha kusweka ndi kupsinjika komweko. Ma lasers a Ultrafast awonetsedwa kuti amatha kudula magalasi awa ndi mphamvu zam'mphepete. Pamadulidwe akulu akulu, femtosecond laser imatha kuyang'ana kumbuyo kwa pepala lagalasi, kukanda mkati mwa galasi popanda kuwononga kutsogolo. Galasiyo imatha kuthyoledwa pogwiritsa ntchito makina kapena matenthedwe amtundu womwe wapatsidwa.
Chithunzi 3. Picosecond ultrafast laser galasi wapadera woboola pakati kudula
04 Mapangidwe a piston mumakampani amagalimoto
Ma injini agalimoto opepuka amapangidwa ndi ma aluminiyamu aloyi, omwe samamva kuvala ngati chitsulo choponyedwa. Kafukufuku wapeza kuti femtosecond laser processing ya pisitoni yagalimoto imatha kuchepetsa mikangano mpaka 25% chifukwa zinyalala ndi mafuta zimatha kusungidwa bwino.
Chithunzi 4. Femtosecond laser processing ya pistoni ya injini yamagalimoto kuti ipititse patsogolo ntchito ya injini
05 Kupanga ma stent a Coronary m'makampani azachipatala
Mamiliyoni a ma stents amaikidwa m'mitsempha yam'mitsempha yapamtima kuti atsegule njira yoti magazi aziyenda m'mitsempha yomwe imapangitsa kuti magazi aziundana, kupulumutsa miyoyo mamiliyoni ambiri chaka chilichonse. Macoronary stents nthawi zambiri amapangidwa kuchokera kuzitsulo (mwachitsanzo, chitsulo chosapanga dzimbiri, nickel-titanium shape memory alloy, kapena posachedwapa cobalt-chromium alloy) waya wa mesh wokhala ndi strut m'lifupi mwake pafupifupi 100 μm. Poyerekeza ndi kudula kwa laser kwautali, ubwino wogwiritsa ntchito ma lasers ofulumira kwambiri kudula mabatani ndi khalidwe lodulidwa kwambiri, kutsirizitsa bwino pamwamba, ndi zinyalala zochepa, zomwe zimachepetsa mtengo wa pambuyo pokonza.
06 Kupanga zida za Microfluidic zamakampani azachipatala
Zida za Microfluidic zimagwiritsidwa ntchito kwambiri m'makampani azachipatala poyesa matenda komanso kuzindikira. Izi nthawi zambiri zimapangidwa ndi jekeseni wang'onoang'ono wa magawo pawokha kenako ndikumangirira pogwiritsa ntchito gluing kapena kuwotcherera. Kupanga kwa Ultrafast laser kwa zida za microfluidic kuli ndi mwayi wopanga ma microchannel a 3D mkati mwazinthu zowonekera monga galasi popanda kufunikira kolumikizana. Njira imodzi ndikupanga laser mwachangu kwambiri mkati mwagalasi yochuluka yotsatiridwa ndi kutsekemera kwamankhwala konyowa, ndipo ina ndi femtosecond laser ablation mkati mwa galasi kapena pulasitiki m'madzi osungunuka kuti muchotse zinyalala. Njira ina ndikuyika makina opangira magalasi pamwamba pagalasi ndikuwasindikiza ndi chivundikiro chagalasi kudzera pa femtosecond laser welding.
Chithunzi 6. Femtosecond laser-induced selective etching kuti ikonzekere njira za microfluidic mkati mwa zida zamagalasi.
07 Kubowola pang'ono kwa nozzle ya jekeseni
Femtosecond laser microhole Machining yalowa m'malo yaying'ono-EDM m'makampani ambiri omwe ali pamsika woponderezedwa kwambiri chifukwa cha kusinthasintha kwakukulu pakusintha mbiri zabowo komanso nthawi zazifupi za makina. Kutha kuwongolera komwe kumangoyang'ana ndikupendekeka kwa mtengowo kudzera pamutu wojambulira wotsogola kwapangitsa kuti pakhale mapangidwe azithunzi (mwachitsanzo, mbiya, flare, convergence, divergence) zomwe zitha kulimbikitsa ma atomization kapena kulowa muchipinda choyaka. Kubowola nthawi zimadalira ablation voliyumu, ndi kubowola makulidwe a 0.2 - 0.5 mm ndi dzenje awiri 0.12 - 0.25 mm, kupanga njira imeneyi kakhumi mofulumira kuposa yaying'ono-EDM. Kubowola kwa microdrilling kumachitika m'magawo atatu, kuphatikiza kuwongola ndikumaliza mabowo oyendetsa. Argon imagwiritsidwa ntchito ngati gasi wothandiza kuteteza borebole kuti asatulutsidwe ndi okosijeni komanso kuteteza plasma yomaliza panthawi yoyambira.
Chithunzi 7. Femtosecond laser mkulu-mwatsatanetsatane processing wa inverted taper dzenje kwa injini dizilo jekeseni.
08 Kutumiza mwachangu kwa laser
M'zaka zaposachedwa, pofuna kukonza kulondola kwa makina, kuchepetsa kuwonongeka kwa zinthu, ndi kuonjezera processing bwino, gawo la micromachining pang'onopang'ono lakhala lolunjika pa ofufuza. Ultrafast laser ili ndi ubwino wambiri wokonza zinthu monga kuwonongeka kochepa komanso kulondola kwakukulu, komwe kwakhala cholinga cholimbikitsa chitukuko cha teknoloji yopangira. Nthawi yomweyo, lasers ultrafast imatha kuchitapo kanthu pazinthu zosiyanasiyana, ndipo kuwonongeka kwa zinthu za laser ndi njira yayikulu yofufuzira. Ultrafast laser imagwiritsidwa ntchito pochotsa zinthu. Pamene kachulukidwe mphamvu ya laser ndi apamwamba kuposa ablation pakhomo la zinthu, pamwamba zinthu ablated adzasonyeza micro-nano kapangidwe ndi makhalidwe ena. Kafukufuku akusonyeza kuti wapadera pamwamba Mapangidwe ndi chodabwitsa wamba kuti zimachitika pamene laser processing zipangizo. Kukonzekera kwazinthu zazing'ono za nano kungathe kupititsa patsogolo zinthuzo komanso kumathandizira kupanga zipangizo zatsopano. Izi zimapangitsa kukonzekera kwapamtunda kakang'ono-nano ndi laser ultrafast njira yaukadaulo yokhala ndi kufunikira kwachitukuko. Pakalipano, pazida zachitsulo, kafukufuku wa ultrafast laser surface texturing amatha kusintha zitsulo zonyowetsa pamwamba, kusintha kugwedezeka kwapamwamba ndi kuvala katundu, kupititsa patsogolo kumamatira kwa ❖ kuyanika, ndi kuchulukitsitsa kwa njira ndi kumamatira kwa maselo.
Chithunzi 8. Superhydrophobic katundu wa laser okonzeka silicon pamwamba
Monga luso lamakono lamakono lamakono, ultrafast laser processing ili ndi makhalidwe ang'onoang'ono omwe amakhudzidwa ndi kutentha, njira yopanda malire yolumikizana ndi zipangizo, ndi kukonza kwapamwamba kwambiri kuposa malire a diffraction. Itha kuzindikira kukonza kwapamwamba komanso kulondola kwapang'ono-nano kwazinthu zosiyanasiyana. ndi katatu-dimensional micro-nano kapangidwe kamangidwe. Kukwaniritsa kupanga laser kwa zida zapadera, zida zovuta ndi zida zapadera kumatsegula njira zatsopano zopangira ma micro-nano. Pakalipano, laser femtosecond yakhala ikugwiritsidwa ntchito kwambiri m'madera ambiri a sayansi: femtosecond laser ingagwiritsidwe ntchito pokonzekera zipangizo zosiyanasiyana za kuwala, monga ma microlens arrays, bionic pawiri maso, optical waveguides ndi metasurfaces; pogwiritsa ntchito kulondola kwake kwapamwamba, kusamvana kwakukulu komanso Ndi mphamvu zopangira katatu, laser ya femtosecond ikhoza kukonzekera kapena kuphatikiza tchipisi ta microfluidic ndi optofluidic monga zigawo za microheater ndi njira zitatu-dimensional microfluidic; Komanso, femtosecond laser akhozanso kukonzekera mitundu yosiyanasiyana ya padziko yaying'ono-nanostructures kukwaniritsa odana ndi reflection , odana ndi reflection, wapamwamba hydrophobic, odana ndi icing ndi ntchito zina; osati zokhazo, femtosecond laser yakhala ikugwiritsidwa ntchito m'munda wa biomedicine, kuwonetsa magwiridwe antchito apamwamba m'magawo monga biological micro-stents, cell culture substrates ndi biological imaging microscopic. Zoyembekeza zokulirapo. Pakadali pano, magawo ogwiritsira ntchito femtosecond laser processing akukulirakulira chaka ndi chaka. Kuphatikiza pa ma micro-optics, microfluidics, multi-functional micro-nanostructures ndi biomedical engineering application, imathandizanso kwambiri m'magawo ena omwe akubwera, monga kukonzekera metasurface. , kupanga kwa micro-nano ndi kusungirako zidziwitso zamitundu yambiri, etc.
Nthawi yotumiza: Apr-17-2024
