Ngakhale kuti ma laser othamanga kwambiri akhalapo kwa zaka zambiri, ntchito zamafakitale zakula mofulumira m'zaka makumi awiri zapitazi. Mu 2019, mtengo wamsika wa ultrafastzinthu za laserKukonza zinthu kunali pafupifupi US$460 miliyoni, ndipo kuchuluka kwa pachaka kwawonjezeka ndi 13%. Madera omwe ma laser othamanga kwambiri agwiritsidwa ntchito bwino pokonza zinthu zamafakitale akuphatikizapo kupanga ndi kukonza ma photomask mumakampani opanga ma semiconductor komanso silicon dicing, kudula/kulemba magalasi ndi (indium tin oxide) kuchotsa filimu ya ITO m'magetsi monga mafoni ndi mapiritsi, kupangira ma piston amakampani opanga magalimoto, kupanga ma coronary stent ndi kupanga zida za microfluidic zamafakitale azachipatala.
01 Kupanga ndi kukonza ma photomask mumakampani opanga ma semiconductor
Ma laser othamanga kwambiri adagwiritsidwa ntchito mu imodzi mwa ntchito zoyambirira zamafakitale pokonza zinthu. IBM idanenanso kuti kugwiritsa ntchito femtosecond laser ablation popanga photomask m'zaka za m'ma 1990. Poyerekeza ndi nanosecond laser ablation, yomwe ingapangitse kutayikira kwachitsulo ndi kuwonongeka kwa galasi, ma femtosecond laser masks sawonetsa kutayikira kwachitsulo, kutayikira kwagalasi, ndi zina zotero. Ubwino wake. Njirayi imagwiritsidwa ntchito popanga ma integrated circuits (ICs). Kupanga IC chip kungafunike masks mpaka 30 ndipo kumawononga >$100,000. Femtosecond laser processing imatha kukonza mizere ndi mfundo pansi pa 150nm.
Chithunzi 1. Kupanga ndi kukonza chigoba cha zithunzi
Chithunzi 2. Zotsatira zabwino za mawonekedwe osiyanasiyana a chigoba kuti zigwiritsidwe ntchito kwambiri pa ultraviolet lithography
02 Kudula silicon mumakampani opanga ma semiconductor
Kudula kwa silicon wafer ndi njira yodziwika bwino yopangira zinthu mumakampani opanga ma semiconductor ndipo nthawi zambiri kumachitika pogwiritsa ntchito makina odulira. Mawilo odulira awa nthawi zambiri amakhala ndi mikwingwirima yaying'ono ndipo ndi ovuta kudula (monga makulidwe < 150 μm). Kudula kwa mawafer a silicon pogwiritsa ntchito laser kwakhala kukugwiritsidwa ntchito mumakampani opanga ma semiconductor kwa zaka zambiri, makamaka mawafer owonda (100-200μm), ndipo kumachitika m'magawo angapo: kudula kwa laser, kutsatiridwa ndi kulekanitsa makina kapena kudula mobisa (monga kuwala kwa laser mkati mwa silicon scribing) kutsatiridwa ndi kulekanitsa tepi pogwiritsa ntchito makina. Nanosecond pulse laser imatha kukonza mawafer 15 pa ola limodzi, ndipo picosecond laser imatha kukonza mawafer 23 pa ola limodzi, ndi mtundu wapamwamba.
03 Kudula/kulemba magalasi mumakampani opanga zamagetsi
Zophimba zogwira ndi magalasi oteteza mafoni ndi ma laputopu zikuchepa ndipo mawonekedwe ena a geometric amapindika. Izi zimapangitsa kuti kudula kwamakina kwachikhalidwe kukhale kovuta. Ma laser odziwika bwino nthawi zambiri amapanga mawonekedwe osadulidwa bwino, makamaka pamene magalasi awa ali ndi zigawo 3-4 ndipo galasi loteteza lapamwamba la 700 μm limachepetsedwa, zomwe zimatha kusweka ndi kupsinjika kwapafupi. Ma laser othamanga kwambiri awonetsedwa kuti amatha kudula magalasi awa ndi mphamvu yabwino m'mphepete. Pakudula kwakukulu kwa flat panel, laser ya femtosecond imatha kuyang'aniridwa kumbuyo kwa pepala lagalasi, ndikukanda mkati mwa galasi popanda kuwononga pamwamba pagalasi. Galasi likhoza kusweka pogwiritsa ntchito njira zamakina kapena zotenthetsera motsatira kapangidwe kake.
Chithunzi 3. Kudula kopangidwa ndi mawonekedwe apadera a galasi la laser la Picosecond ultrafast
04 Maonekedwe a Piston mumakampani opanga magalimoto
Mainjini a magalimoto opepuka amapangidwa ndi aluminiyamu, zomwe sizimawonongeka ngati chitsulo chopangidwa ndi chitsulo. Kafukufuku wapeza kuti kukonza ma piston a galimoto pogwiritsa ntchito laser ya femtosecond kungachepetse kukangana ndi 25% chifukwa zinyalala ndi mafuta zimatha kusungidwa bwino.
Chithunzi 4. Kukonza ma pistoni a injini ya galimoto pogwiritsa ntchito laser ya Femtosecond kuti injini igwire bwino ntchito
05 Kupanga stent ya mtima mumakampani azachipatala
Mamilioni a ma coronary stents amaikidwa m'mitsempha ya mtima ya thupi kuti atsegule njira yoti magazi aziyenda m'mitsempha yomwe inali yolimba, zomwe zimapulumutsa miyoyo ya anthu mamiliyoni ambiri chaka chilichonse. Ma coronary stents nthawi zambiri amapangidwa ndi chitsulo (monga chitsulo chosapanga dzimbiri, nickel-titanium shape memory alloy, kapena cobalt-chromium alloy posachedwapa) waya wokhala ndi mulifupi wa strut wa pafupifupi 100 μm. Poyerekeza ndi kudula kwa laser kwa nthawi yayitali, ubwino wogwiritsa ntchito ma laser othamanga kwambiri kudula mabulaketi ndi wapamwamba kwambiri, kutsirizika bwino kwa pamwamba, komanso zinyalala zochepa, zomwe zimachepetsa ndalama zogwiritsidwa ntchito pambuyo pokonza.
06 Kupanga zipangizo zamagetsi zamagetsi zamagetsi m'makampani azachipatala
Zipangizo za microfluidic zimagwiritsidwa ntchito kwambiri m'makampani azachipatala poyesa ndi kuzindikira matenda. Izi nthawi zambiri zimapangidwa pogwiritsa ntchito njira ya micro-injection molding ya ziwalo zina kenako n’kuzilumikiza pogwiritsa ntchito gluing kapena welding. Kupanga zipangizo za microfluidic pogwiritsa ntchito laser ya Ultrafast kuli ndi ubwino wopanga njira zazing'ono za 3D mkati mwa zipangizo zowonekera monga galasi popanda kufunikira kulumikizana. Njira imodzi ndi kupanga laser ya ultrafast mkati mwa galasi lalikulu kutsatiridwa ndi wet chemical etching, ndipo ina ndi femtosecond laser ablation mkati mwa galasi kapena pulasitiki m'madzi osungunuka kuti muchotse zinyalala. Njira ina ndi kuyika njira pamwamba pa galasi ndi kuzitseka ndi chivundikiro chagalasi kudzera mu femtosecond laser welding.
Chithunzi 6. Kudula kosankhidwa kwa Femtosecond laser kuti akonze njira za microfluidic mkati mwa zinthu zagalasi
07 Kuboola pang'ono kwa nozzle ya injector
Makina opangira ma laser a Femtosecond microhole alowa m'malo mwa micro-EDM m'makampani ambiri pamsika wa injector wopanikizika kwambiri chifukwa cha kusinthasintha kwakukulu pakusintha ma profiles a flow hole komanso nthawi yochepa yopangira ma machining. Kutha kuwongolera malo olunjika ndi kupendekeka kwa beam kudzera mu precessing scan head kwapangitsa kuti pakhale mapangidwe a ma aperture profiles (monga barrel, flare, convergence, divergence) omwe angathandize atomization kapena kulowa mu chipinda choyaka moto. Nthawi yobowola imadalira kuchuluka kwa ablation, ndi makulidwe a drill a 0.2 - 0.5 mm ndi mainchesi a 0.12 - 0.25 mm, zomwe zimapangitsa kuti njirayi ikhale yofulumira kakhumi kuposa micro-EDM. Microdrilling imachitika m'magawo atatu, kuphatikiza roughing ndi kumaliza mabowo odutsa. Argon imagwiritsidwa ntchito ngati mpweya wothandizira kuteteza borehole ku oxidation ndikuteteza plasma yomaliza panthawi yoyambira.
Chithunzi 7. Kukonza bwino kwambiri kwa dzenje lopindika la Femtosecond laser la inverted taper for injector ya injini ya dizilo
08 Kukonza zinthu mwachangu kwambiri pogwiritsa ntchito laser
M'zaka zaposachedwa, pofuna kupititsa patsogolo kulondola kwa makina, kuchepetsa kuwonongeka kwa zinthu, ndikuwonjezera magwiridwe antchito, gawo la micromachining lakhala chidwi cha ofufuza pang'onopang'ono. Laser ya Ultrafast ili ndi maubwino osiyanasiyana opangira monga kuwonongeka kochepa komanso kulondola kwambiri, komwe kwakhala cholinga cholimbikitsa chitukuko cha ukadaulo wopangira. Nthawi yomweyo, ma laser a ultrafast amatha kugwira ntchito pazinthu zosiyanasiyana, ndipo kuwonongeka kwa zinthu zopangira laser ndi njira yayikulu yofufuzira. Laser ya Ultrafast imagwiritsidwa ntchito kupukuta zinthu. Pamene mphamvu ya laser ili pamwamba kuposa malire a ablation a zinthuzo, pamwamba pa zinthu zochotsedwa padzawonetsa kapangidwe ka micro-nano kokhala ndi makhalidwe enaake. Kafukufuku akuwonetsa kuti Kapangidwe kapadera ka pamwamba ndi chinthu chofala chomwe chimachitika pamene zinthu zopangidwira laser zikukonzedwa. Kukonzekera kwa kapangidwe ka micro-nano pamwamba kumatha kukonza mawonekedwe a chinthucho komanso kulola kuti zinthu zatsopano zipangidwe. Izi zimapangitsa kukonzekera kwa kapangidwe ka micro-nano pamwamba ndi laser ya ultrafast kukhala njira yaukadaulo yofunika kwambiri yopangira. Pakadali pano, pa zipangizo zachitsulo, kafukufuku wokhudza kuluka kwa pamwamba pa laser kofulumira kwambiri kungathandize kukonza zinthu zonyowetsa pamwamba pachitsulo, kukonza kukangana ndi kuwonongeka kwa pamwamba, kuwonjezera kuuma kwa utoto, komanso kuchulukana ndi kumamatira kwa maselo mbali zonse.
Chithunzi 8. Kapangidwe ka superhydrophobic ka pamwamba pa silicon yokonzedwa ndi laser
Monga ukadaulo wapamwamba kwambiri wopangira zinthu, ultrafast laser processing ili ndi mawonekedwe a malo ang'onoang'ono omwe amakhudzidwa ndi kutentha, njira yosalunjika yolumikizirana ndi zinthu, komanso processing yapamwamba kwambiri kupitirira malire a diffraction. Imatha kukwaniritsa processing yapamwamba komanso yolondola kwambiri ya micro-nano ya zinthu zosiyanasiyana. komanso kupanga kapangidwe ka micro-nano ka magawo atatu. Kupanga laser ya zipangizo zapadera, zomangamanga zovuta ndi zida zapadera kumatsegula njira zatsopano zopangira micro-nano. Pakadali pano, femtosecond laser yagwiritsidwa ntchito kwambiri m'magawo ambiri asayansi apamwamba: femtosecond laser ingagwiritsidwe ntchito kukonzekera zida zosiyanasiyana za kuwala, monga microlens arrays, bionic compound eyes, optical waveguides ndi metasurfaces; pogwiritsa ntchito kulondola kwake kwakukulu, kutsimikizika kwakukulu komanso Ndi mphamvu zake zogwirira ntchito zitatu, femtosecond laser imatha kukonzekera kapena kuphatikiza ma microfluidic ndi optofluidic chips monga zigawo za microheater ndi njira zitatu za microfluidic; Kuphatikiza apo, femtosecond laser imathanso kukonzekera mitundu yosiyanasiyana ya ma micro-nanostructures pamwamba kuti ikwaniritse ntchito zotsutsana ndi kuwunikira, kutsutsa kuwunikira, super-hydrophobic, anti-icing ndi zina; osati zokhazo, femtosecond laser yagwiritsidwanso ntchito m'munda wa biomedicine, kuwonetsa magwiridwe antchito abwino kwambiri m'magawo monga biological micro-stents, cell culture substrates ndi biological microscopic imaging. Mapeto ogwiritsira ntchito ambiri. Pakadali pano, magawo ogwiritsira ntchito femtosecond laser processing akukulirakulira chaka ndi chaka. Kuphatikiza pa ma micro-optics omwe atchulidwa pamwambapa, microfluidics, multi-functional micro-nanostructures ndi biomedical engineering applications, imagwiranso ntchito yayikulu m'magawo ena omwe akutuluka, monga kukonzekera metasurface. , kupanga micro-nano ndi kusungira zambiri za optical, ndi zina zotero.
Nthawi yotumizira: Epulo-17-2024
