Ukadaulo woyeretsa wa laserNdi njira yabwino yogwiritsira ntchito ukadaulo wa laser m'munda wa uinjiniya. Mfundo yake yayikulu imagwiritsa ntchito mphamvu zambiri za ma laser kuti athe kuyanjana pakati pa kuwala kwa laser ndi zinthu zodetsa zomwe zimamatira ku zinthu zogwirira ntchito. Zinthu zodetsa zimalekanitsidwa ndi zinthu zodetsa kudzera mu kukula kwa kutentha nthawi yomweyo, kusungunuka, kusinthasintha kwa mpweya ndi njira zina. Chifukwa cha luso lake lapamwamba, kusamala chilengedwe komanso kusunga mphamvu, ukadaulo woyeretsa laser wagwiritsidwa ntchito bwino pakuyeretsa matayala, kuchotsa utoto wa thupi la ndege, kubwezeretsa zinthu zakale ndi zina.
Ukadaulo woyeretsa wachikhalidwe umaphatikizapo kuyeretsa kwa makina (kupukuta mchenga, kuyeretsa madzi ndi mpweya wothamanga kwambiri, ndi zina zotero), kuyeretsa dzimbiri pogwiritsa ntchito mankhwala, kuyeretsa pogwiritsa ntchito ultrasound, kuyeretsa ayezi wouma ndi zina zambiri. Ukadaulo uwu umagwiritsidwa ntchito kwambiri m'mafakitale osiyanasiyana. Mwachitsanzo, kupukuta mchenga kumatha kuchotsa mawanga a dzimbiri achitsulo, ma burrs pamwamba ndi zokutira za conformal pa bolodi la ma circuit posankha zinthu zolimba zosiyanasiyana. Kuyeretsa dzimbiri pogwiritsa ntchito mankhwala kumagwiritsidwa ntchito kwambiri pochotsa mafuta pamwamba pa zida, kuyeretsa ma boiler ndi kutsegula mapaipi amafuta. Ngakhale kuti ndi achikulire, njira zachikhalidwe zimakhala ndi zovuta zazikulu: kupukuta mchenga kumawononga mosavuta malo okonzedwa, ndipo kuyeretsa kwa mankhwala pogwiritsa ntchito mankhwala kumayambitsa kuipitsa chilengedwe ndipo kumatha kuipitsa ma substrates ngati sikugwiritsidwa ntchito bwino. Kubwera kwa kuyeretsa pogwiritsa ntchito laser kukuwonetsa kusintha kwa ukadaulo woyeretsa. Pogwiritsa ntchito mphamvu zambiri za laser, kulondola komanso kutumiza bwino, kuyeretsa pogwiritsa ntchito laser kumaposa njira zachikhalidwe poyeretsa bwino, molondola komanso pamalo oyenera. Kumachotsa kuipitsa chilengedwe chifukwa cha kuyeretsa pogwiritsa ntchito mankhwala ndipo sikuwononga ma substrates.
Mfundo Zotsukira ndi Laser
Kodi kuyeretsa ndi laser n'chiyani kwenikweni? Kumatanthauza njira yochotsera zinthu kuchokera pamalo olimba (kapena nthawi zina amadzimadzi) pogwiritsa ntchito kuwala kwa laser beam. Pa kuwala kochepa kwa laser, mphamvu ya laser yomwe imayamwa imatenthetsa zinthu, zomwe zimapangitsa kuti evaporation kapena sublimation ichitike. Pa kuwala kwakukulu kwa laser, zinthu nthawi zambiri zimasanduka plasma. Kuyeretsa ndi laser nthawi zambiri kumagwiritsa ntchito ma laser oyendetsedwa kuti achotse zinthu, ngakhale kuti ma laser oyenda mosalekeza amatha kuyeretsa zinthu mwamphamvu mokwanira. Ma laser ozama kwambiri a ultraviolet excimer, okhala ndi mafunde ozungulira 200 nm, amagwiritsidwa ntchito makamaka pojambula.
Kuzama kwamphamvu ya laserKuyamwa ndi kuchuluka kwa zinthu zomwe zachotsedwa pa pulse iliyonse kumadalira mawonekedwe a kuwala kwa chinthucho, komanso kutalika kwa nthawi ya laser ndi nthawi ya pulse. Kulemera konse komwe kumachotsedwa kuchokera ku cholinga pa pulse iliyonse kumatanthauzidwa ngati kuchuluka kwa ablation. Makhalidwe a kuwala kwa laser monga liwiro la scanning ndi kufalikira kwa mzere zimakhudza kwambiri njira yo ablation.
Mitundu ya Ukadaulo Wotsuka wa Laser
1) Kutsuka Kouma ndi Laser
Kuyeretsa kouma pogwiritsa ntchito laser kumaphatikizapoKuwala kwa laser mwachindunji kwa zinthu zogwirira ntchito. Zoipitsa kapena zinthu zoipitsa zimayamwa mphamvu ya laser, kukweza kutentha kwake ndikuyambitsa kufalikira kwa kutentha kapena kugwedezeka kwa kutentha kwa substrate, komwe kumalekanitsa zoipitsa ndi zinthu zoipitsa. Zimachitika m'njira ziwiri: kaya zinthu zoipitsa pamwamba zimayamwa mphamvu ya laser ndikukulirakulira, kapena zinthu zoipitsa zimayamwa mphamvu ndikugwedezeka ndi kutentha.
Mu 1969, SM Bedair ndi anzake adapeza kuti njira zochiritsira pamwamba (kutentha, dzimbiri la mankhwala, kuphulika kwa mchenga) zonse zinali ndi zofooka. Anaona kuti mphamvu zambiri za ma laser olunjika zimatha kusandutsa zinthu pamwamba popanda kuwononga zinthu. Kuyesa kunatsimikizira kuti laser ya ruby ya Q-switched yokhala ndi mphamvu ya 30 MW/cm² imatha kuyeretsa zodetsa kuchokera pamwamba pa silicon popanda kuwonongeka kwa zinthu pansi, zomwe zinayambitsa kuyambitsidwa koyamba kwa kuyeretsa kouma kwa laser.
Chiŵerengero chonse choyeretsera chikhoza kufotokozedwa kudzera mu kuchuluka kwa zinyalala za filimu, monga momwe zasonyezedwera pansipa:
(Fomula: ε—laser pulse energy index; h—contaminant film thickness index; E—film elastic modulus index)
2) Kuyeretsa ndi Laser Wet
Asanagwiritse ntchito laser, filimu yamadzimadzi imakutidwa kale pamwamba pa workpiece. Mphamvu ya laser imatenthetsa ndi kuipitsa filimuyo mwachangu, ndikupanga mafunde odzidzimutsa omwe amachotsa tinthu toyipa kuchokera ku substrate. Njirayi siifuna mankhwala pakati pa substrate ndi filimu yamadzimadzi, zomwe zimalepheretsa zinthu zomwe zimagwiritsidwa ntchito.
Mu 1991, K. Imen ndi anzake adayang'ana zotsalira za submicron pa ma wafer a semiconductor ndi zitsulo pambuyo poyeretsa mwachizolowezi. Adapaka substrates ndi filimu yoyamwa laser ndikuyiyatsa ndi laser ya CO₂. Filimuyo idatenga mphamvu, idatenthedwa mwachangu, idawiritsidwa ndikupangidwa ndi nthunzi yophulika, ndikuchotsa zonyansa pamwamba - izi zikutanthauza kuyeretsa konyowa ndi laser.
3) Kuyeretsa Mafunde a Laser Plasma Shockwave
Mafunde a plasma otchedwa laser shockwaves amapangidwa pamene ma laser amasintha mpweya kukhala mafunde a plasma shockwaves ozungulira panthawi yowunikira. Mafunde awa amagunda ma substrate, kutulutsa mphamvu kuti achotse zodetsa popanda kuwononga substrate (ma laser sagwirizana mwachindunji ndi ma substrate). Ukadaulo uwu umatsuka tinthu tating'onoting'ono tofanana ndi ma nanometers makumi ambiri ndipo suika malire pa kutalika kwa mafunde a laser.
Mfundo zakuthupi zoyeretsera plasma zafupikitsidwa motere:
a) Miyendo ya laser imatengedwa ndi gawo lodetsa lomwe lili pamwamba pa chinthu chomwe chikufunidwa.
b) Kutenga mphamvu zambiri kumapanga plasma yomwe imakula mofulumira (mpweya wosakhazikika womwe umayikidwa kwambiri mu ayoni), zomwe zimapangitsa kuti mafunde a shockwave ayambe.
c) Mafunde a shockwave amaduladula ndikuchotsa zodetsa.
d) Ma pulse a laser ayenera kukhala afupikitsa mokwanira kuti kutentha kusamachuluke komwe kungawononge gawo lapansi.
e) Kuyesera kukuwonetsa mitundu ya plasma pamwamba pa zitsulo pamene ma oxide alipo.
Kupanga kwa plasma kumachitika pamwamba pa malire a mphamvu, zomwe zimatengera gawo loipitsidwa kapena la oxide lomwe liyenera kuchotsedwa. Pali malire ena apamwamba, omwe amaposa omwe gawo lapansi limawonongeka. Kuti muwonetsetse kuti kuyeretsa bwino popanda kuwonongeka kwa gawo lapansi, magawo a laser ayenera kusinthidwa kuti mphamvu ya pulse ikhalebe pakati pa malire awiriwa.
Mu 2001, JM Lee ndi anzake adagwiritsa ntchito mafunde a plasma shockwaves ochokera ku ma laser amphamvu kwambiri. Laser yoyendetsedwa ndi pulsed yokhala ndi mphamvu ya 2.0 J/cm² (yoposa malire a kuwonongeka kwa silicon) idawunikira ma wafers a silicon nthawi imodzi, ndikuchotsa bwino tinthu ta tungsten ta 1 μm. Kunena zoona, kuyeretsa mafunde a plasma shockwave ndi gawo la kuyeretsa kouma.
Poyamba idapangidwa kuti ichotse tinthu tating'onoting'ono kuchokera ku ma wafer a semiconductor, njira zitatuzi zotsukira pogwiritsa ntchito laser zakula mpaka kutsuka nkhungu ya matayala, kuchotsa utoto wa khungu la ndege, kubwezeretsa zotsalira zachikhalidwe ndi zina zambiri. Mpweya wopanda mphamvu ukhoza kuwulutsidwa pazigawo panthawi ya kuwala kwa laser kuti uchotse nthawi yomweyo zinthu zodetsa zomwe zachotsedwa, kupewa kubwezeretsanso ndi kusungunuka kwa okosijeni.
Kugwiritsa Ntchito Ukadaulo Wotsuka ndi Laser
1) Makampani Opanga Ma Semiconductor: Kuyeretsa Ma Wafers a Semiconductor ndi Ma Substrates Optical
Ma wafer a semiconductor ndi ma substrate optical amadutsa njira zofanana zokonzera (kudula, kupukuta) kuti apange mawonekedwe omwe amafunidwa, zomwe zimapangitsa kuti pakhale zinthu zodetsa zomwe zimakhala zovuta kuchotsa komanso zomwe zimatha kuchotsedwa. Zinthu zodetsa zomwe zili pa ma wafer zimawononga ubwino wa kusindikiza kwa dera ndikufupikitsa nthawi ya moyo wa chip. Pa ma substrate optical, zimawononga magwiridwe antchito a chipangizo cha optical ndi chophimba, zomwe zimapangitsa kuti mphamvu zisagawike mofanana komanso kuti ntchito ikhale yochepa.
Kuyeretsa kouma pogwiritsa ntchito laser sikugwiritsidwa ntchito kawirikawiri pano chifukwa cha zoopsa za kuwonongeka kwa substrate, pomwe kuyeretsa konyowa ndi kuyeretsa kwa plasma shockwave kuli ndi ntchito zambiri zopambana. Xu Chuanyi ndi anzake adayika utoto wa maginito wa micron-scale ngati filimu ya dielectric pa ma substrate optical optical optical, zomwe zimapangitsa kuti kuyeretsa kwa laser kukhale kogwira mtima. Ngakhale kuti tinthu todetsedwa tonse tinawonjezeka, kukula kwake ndi kuphimba kwake kunachepa kwambiri. Zhang Ping adaphunzira za zotsatira za mtunda wogwirira ntchito ndi mphamvu ya laser pakugwira bwino ntchito koyeretsa tinthu ta kukula kosiyanasiyana. Kuyesera kunawonetsa kuti laser ya 240 mJ inapeza kuyeretsa bwino kwambiri tinthu ta polystyrene pagalasi loyendetsa magetsi pamtunda wa 1.90 mm. Kuyeretsa bwino kunakhala bwino ndi mphamvu ya laser yambiri, ndipo tinthu tating'onoting'ono tinali kosavuta kuchotsa.
2) Makampani Ogulitsa Zitsulo: Kuyeretsa Malo Opangira Zitsulo
Kuyeretsa pamwamba pa chitsulo kumayang'ana kwambiri zinthu zodetsa za macroscopic: zigawo za oxide/dzimbiri, utoto, zokutira ndi zina zolumikizira, zomwe zimagawidwa m'magulu a zinthu zodetsa zachilengedwe (utoto, zokutira) kapena zinthu zosapangidwa ndi organic (dzimbiri). Kuyeretsa kumakwaniritsa zofunikira pakukonza/kugwiritsa ntchito pambuyo pake: mwachitsanzo, kuchotsa zigawo za oxide zokhuthala 10 μm kuchokera ku titanium alloys musanaziwotchere, kuchotsa utoto kuchokera ku zikopa za ndege kuti upakidwenso utoto, ndikutsuka zotsalira za rabara kuchokera ku nkhungu za matayala kuti zitsimikizire kuti zinthuzo ndi zamoyo.
Zitsulo zili ndi malire owononga kwambiri kuposa malire awo oyeretsera omwe ali ndi zodetsa, zomwe zimathandiza kuyeretsa bwino ndi ma laser oyendetsedwa bwino. Ntchito zokhwima zikuphatikizapo: Wang Lihua ndi anzake adawonetsa kuti laser ya 5.1 J/cm² idachotsa zigawo za oxide kuchokera ku aluminiyamu ya A5083-111H pomwe ikusunga mtundu wa substrate, ndipo laser ya pulsed ya 100 W idayeretsa bwino zigawo za titanium alloy oxide ndikuwonjezera kuuma kwa pamwamba. Opanga m'nyumba (Raycus Laser, Han's Laser, Shenzhen Chuangxin) amapereka kwambiri zida zoyeretsera laser za nkhungu za rabara, dzimbiri lachitsulo ndi kuchotsa mafuta pang'ono.
3) Kusunga Zidutswa Zachikhalidwe: Kuyeretsa Zidutswa Zachikhalidwe ndi Zinthu Zopangidwa ndi Mapepala
Zinthu zakale zachitsulo ndi miyala zimasonkhanitsa dothi, madontho a inki ndi zinthu zina zodetsa pakapita nthawi, zomwe zimafuna kuchotsedwa kuti zibwezeretse mawonekedwe ake oyambirira. Zinthu zakale za mapepala (zojambula, zilembo zolembedwa) zimakhala ndi nkhungu ndi ma plaque akasungidwa mosayenera, zomwe zimawononga kwambiri mkhalidwe wawo komanso kufunika kwa chikhalidwe/mbiri.
Zhao Ying ndi anzake adatsimikizira kuti kuyeretsa kwa UV kwa ma plaque a nkhungu pa pepala la mpunga: kusanthula kamodzi pa 3.2 J/mm² kunachotsa ma plaque owonda, pomwe ma scan awiri adachotsa kwathunthu; mphamvu zambiri za laser zinawononga pepalalo. Zhang Xiaotong adabwezeretsa bwino chinthu chamkuwa chokongoletsedwa ndi golide pogwiritsa ntchito njira yonyowa ndi laser. Zhang Licheng adagwiritsa ntchito kuyeretsa kwa laser ku chifaniziro cha dothi chachikazi chojambulidwa kuchokera ku Han Dynasty. Yuan Xiaodong ndi anzake adayesa momwe kuyeretsa kwa laser kumagwirira ntchito pazinthu zakale za miyala, poyerekeza kuwonongeka kwa substrate ndi momwe amachotsera inki, utsi ndi utoto pa miyala yamchenga.
Mapeto
Kuyeretsa pogwiritsa ntchito laser ndi ukadaulo wapamwamba wokhala ndi kafukufuku wochuluka komanso mwayi wogwiritsa ntchito mu ndege, zida zankhondo, zamagetsi ndi zina zolondola kwambiri. Popeza yakula m'mafakitale ambiri chifukwa cha kugwira ntchito bwino, kusamala chilengedwe komanso zotsatira zabwino zoyeretsa, kugwiritsa ntchito kwake kukupitilira kukula. Kupatula kuchotsa utoto ndi dzimbiri komwe kwakhazikitsidwa, kupita patsogolo kwaposachedwa kukuphatikizapo kuyeretsa pogwiritsa ntchito laser kwa zigawo za oxide pa waya wachitsulo. Kukula kwamtsogolo kumadalira kukulitsa kugwiritsa ntchito komwe kulipo, kulowa m'magawo atsopano ndikusintha zida:
- Limbikitsani kafukufuku wa chiphunzitso kuti atsogolere kugwiritsa ntchito kothandiza. Kafukufuku wamakono amadalira kwambiri zoyeserera, zopanda maziko okhwima a chiphunzitso. Kukhazikitsa dongosolo lotere ndikofunikira kwambiri kuti ukadaulo ukhale wokhwima.
- Wonjezerani ntchito m'minda yomwe ilipo komanso yatsopano. Pochotsa utoto/dzimbiri, ntchito zomwe zikubwera zikuphatikizapo kuyeretsa waya wachitsulo, zomwe zimapangitsa kuti pakhale nthaka yachonde.
- Pangani zida zatsopano zoyeretsera pogwiritsa ntchito laser, zomwe zingagwiritsidwe ntchito m'njira zosiyanasiyana (monga, kuchotsa utoto/dzimbiri pamodzi) ndi zida zapadera (monga, zida zopangidwira/ulusi wa malo otsekedwa). Kudzipangira nokha zinthu pogwiritsa ntchito makina olumikizirana ndi maloboti a mafakitale ndi njira yabwino.
Nthawi yotumizira: Meyi-14-2026
