Mfundo, mitundu ndi kagwiritsidwe ntchito kakuyeretsa ndi laserukadaulo
Ukadaulo woyeretsa pogwiritsa ntchito laser ndi njira yabwino yogwiritsira ntchito ukadaulo wa laser m'munda wa uinjiniya. Mfundo yake yayikulu ndikugwiritsa ntchito mphamvu zambiri za laser kuti zigwirizane ndi zinthu zodetsa zomwe zimamatira ku gawo la ntchito, zomwe zimapangitsa kuti zilekanitsidwe ndi gawo la ntchitoyo mwa kukulitsa kutentha nthawi yomweyo, kusungunuka, komanso kutulutsa mpweya. Ukadaulo woyeretsa pogwiritsa ntchito laser umadziwika ndi kugwira ntchito bwino, kusamala chilengedwe, komanso kusunga mphamvu. Wagwiritsidwa ntchito bwino m'magawo monga kuyeretsa nkhungu ya matayala, kuchotsa utoto wa thupi la ndege, komanso kubwezeretsa zinthu zakale zachikhalidwe.
Ukadaulo wachikhalidwe woyeretsa umaphatikizapokuyeretsa kukangana kwa makina(kuyeretsa mchenga, kuyeretsa madzi pogwiritsa ntchito mphamvu yamagetsi, ndi zina zotero), kuyeretsa dzimbiri pogwiritsa ntchito mankhwala, kuyeretsa pogwiritsa ntchito ma ultrasound, kuyeretsa ayezi ouma, ndi zina zotero. Maukadaulo oyeretsa awa akhala akugwiritsidwa ntchito kwambiri m'mafakitale osiyanasiyana. Mwachitsanzo, kuyeretsa mchenga kumatha kuchotsa mawanga a dzimbiri achitsulo, zitsulo pamwamba pa matabwa, ndi varnish yoteteza katatu pa bolodi la ma circuit posankha zinthu zolimba zosiyanasiyana. Ukadaulo woyeretsa dzimbiri pogwiritsa ntchito mankhwala umagwiritsidwa ntchito kwambiri poyeretsa madontho a mafuta pamalo a zida, masikelo mu boilers, ndi mapaipi amafuta. Ngakhale kuti ukadaulo woyeretsawu wapangidwa bwino, udakali ndi mavuto ena. Mwachitsanzo, kuyeretsa mchenga kumatha kuwononga mosavuta malo okonzedwa, ndipo kuyeretsa kwa mankhwala kumatha kuwononga chilengedwe ndi dzimbiri pamalo oyeretsedwa ngati sikusamalidwa bwino. Kubwera kwa ukadaulo woyeretsa pogwiritsa ntchito laser kumayimira kusintha kwa ukadaulo woyeretsa. Kumagwiritsa ntchito mphamvu zambiri, kulondola kwambiri, komanso kutumiza bwino mphamvu ya laser, ndipo kuli ndi ubwino woonekeratu kuposa ukadaulo wachikhalidwe woyeretsa pankhani yoyeretsa bwino, kuyeretsa molondola, ndi malo oyeretsera. Kutha kupewa kuipitsa chilengedwe komwe kumachitika chifukwa cha kuyeretsa kwa mankhwala ndi ukadaulo wina woyeretsa, ndipo sikuwononga gawo lapansi.
Kodi kuyeretsa ndi laser n'chiyani? Kuyeretsa ndi laser ndi njira yomwe kuwala kwa laser kumagwiritsidwa ntchito kuchotsa zinthu pamwamba pa chinthu cholimba (kapena nthawi zina madzi). Pa kuwala kochepa kwa laser, zinthuzo zimatenthedwa ndi mphamvu ya laser yomwe imayamwa ndipo zimasanduka nthunzi kapena zimasungunuka. Pa kuwala kwakukulu kwa laser, zinthuzo nthawi zambiri zimakhala plasma. Nthawi zambiri, kuyeretsa ndi laser kumatanthauza kuchotsa zinthu pogwiritsa ntchito ma laser oyendetsedwa, koma ngati mphamvu ya laser ili yokwanira, kuwala kwa laser kopitilira muyeso kungagwiritsidwe ntchito kuchotsa zinthuzo. Laser yoyezera kuwala kwakuya kwa ultraviolet imagwiritsidwa ntchito makamaka pochotsa kuwala. Kutalika kwa laser komwe kumagwiritsidwa ntchito pochotsa kuwala ndi pafupifupi 200nm. Kuzama kwa kuyamwa kwa mphamvu ya laser ndi kuchuluka kwa zinthu zomwe zimachotsedwa ndi kuwala kwa laser kumadalira mawonekedwe a zinthuzo, komanso kutalika kwa kuwala ndi kutalika kwa kuwala. Kulemera konse komwe kumachotsedwa kuchokera pa chandamale ndi kuwala kwa laser kulikonse nthawi zambiri kumatchedwa kuchuluka kwa ablation. Liwiro la scanning la kuwala kwa laser ndi kuphimba kwa mzere woskanira, ndi zina zotero, zidzakhudza kwambiri njira yochotsera kuwala.
Mitundu ya Ukadaulo Wotsuka wa Laser
1) Kuyeretsa kouma pogwiritsa ntchito laser: Kuyeretsa kouma pogwiritsa ntchito laser kumatanthauza kuwala kwachindunji kwa chotsukira pogwiritsa ntchito laser yothamanga, zomwe zimapangitsa kuti zodetsa za pansi kapena pamwamba zitenge mphamvu ndikuwonjezera kutentha, zomwe zimapangitsa kuti kutentha kuchuluke kapena kugwedezeka kwa kutentha kwa maziko, motero zimalekanitsa ziwirizi. Njirayi ikhoza kugawidwa m'magawo awiri: choyamba ndi chakuti zodetsa za pamwamba zimatengera mphamvu ya laser ndikukulirakulira; china ndi chakuti maziko amatengera mphamvu ya laser ndikupanga kugwedezeka kwa kutentha. Mu 1969, SM Bedair et al. adapeza kuti njira zosiyanasiyana zochizira pamwamba monga kutentha, dzimbiri la mankhwala, ndi kuyeretsa mchenga zonse zili ndi zovuta zosiyanasiyana. Nthawi yomweyo, kuchuluka kwa mphamvu pambuyo pa laser kungapangitse kuti kutuluka kwa nthunzi pamwamba pa zinthu kutheke, zomwe zimapangitsa kuti kuyeretsa pamwamba pa zinthu kusakhale kowononga. Kudzera mu zoyesera, zidapezeka kuti kugwiritsa ntchito laser ya ruby Q-switched yokhala ndi mphamvu ya 30 MW/cm2 kumatha kuyeretsa zodetsa za pamwamba pa zinthu za silicon popanda kuwononga maziko, ndipo kwa nthawi yoyamba, kuyeretsa zodetsa za pamwamba pogwiritsa ntchito laser kunachitika. Chiŵerengero chonse chikhoza kufotokozedwa ndi kuchuluka kwa kugawanika kwa zidutswa za filimu, motere:
Mu fomula, ε imayimira chizindikiro cha mphamvu ya laser pulse, h imayimira chizindikiro cha makulidwe a filimu yodetsa, ndipo E imayimira chizindikiro cha elastic modulus cha filimuyo.
2) Kuyeretsa Mwa Kunyowa ndi Laser: Ntchito yoyeretsera isanalowetsedwe ku laser yoyendetsedwa ndi pulsed, filimu yamadzimadzi yophimba pamwamba imayikidwa. Pansi pa mphamvu ya laser, kutentha kwa filimu yamadzimadzi kumakwera mofulumira ndikusanduka nthunzi. Panthawi yopuma, mafunde amakhudzidwa amapangidwa, omwe amagwira ntchito pa tinthu toipitsa ndikupangitsa kuti tichoke pa substrate. Njirayi imafuna kuti substrate ndi filimu yamadzimadzi zisagwirizane, motero kuchepetsa kuchuluka kwa zinthu zomwe zimagwiritsidwa ntchito. Mu 1991, K. Imen et al. adathetsa vuto la zotsalira za sub-micron tinthu toipitsa pamwamba pa ma wafer a semiconductor ndi zinthu zachitsulo pambuyo poti njira zachikhalidwe zoyeretsera zagwiritsidwa ntchito, ndipo adaphunzira kugwiritsa ntchito kupaka filimu pamwamba pa substrate yomwe imatha kuyamwa mphamvu ya laser bwino. Pambuyo pake, pogwiritsa ntchito laser ya CO2, filimuyo idayamwa mphamvu ya laser ndikuwonjezera kutentha mwachangu ndikuwiritsa, ndikupanga nthunzi yophulika, yomwe idachotsa zoipitsa pamwamba pa substrate. Njira yoyeretsera iyi imatchedwa laser wet cleaning.
3) Kuyeretsa Mafunde Odzidzimutsa a Plasma ndi Laser: Mafunde odzidzimutsa a plasma ndi laser amapangidwa pamene laser imawunikira mpweya ndikupangitsa kuti mafunde odzidzimutsa a plasma apangidwe. Mafunde odzidzimutsa amagwira ntchito pamwamba pa workpiece kuti ayeretsedwe ndipo amatulutsa mphamvu kuti achotse zoipitsa. Laser sigwira ntchito pa substrate, motero siiwononga substrate. Ukadaulo woyeretsa mafunde odzidzimutsa a plasma ndi laser tsopano ukhoza kuyeretsa tinthu tating'onoting'ono tokhala ndi ma nanometers angapo, ndipo palibe zoletsa pa kutalika kwa mafunde a laser. Mfundo yeniyeni yoyeretsa plasma ikhoza kufotokozedwa motere: a) Mzere wa laser womwe umatulutsidwa ndi laser umatengedwa ndi wosanjikiza wodetsa pamwamba womwe wakonzedwa. b) Kuchuluka kwa kuyamwa kumapanga plasma yomwe ikukula mofulumira (mpweya wosakhazikika kwambiri) ndipo imapanga mafunde odzidzimutsa. c) Mafunde odzidzimutsa amachititsa kuti zoipitsa zigawikane ndikuchotsedwa. d) Kutalika kwa pulse ya kuwala kuyenera kukhala kochepa mokwanira kuti tipewe kusonkhana kwa kutentha komwe kungawononge pamwamba pomwe pakonzedwa. e) Kuyesera kwawonetsa kuti pakakhala ma oxide pamwamba pa chitsulo, plasma imapangidwa pamwamba pa chitsulo. Plasma imapangidwa kokha pamene mphamvu yapitirira malire, zomwe zimatengera gawo lochotsedwa la kuipitsidwa kapena gawo la oxide. Zotsatira za malire awa ndizofunikira kwambiri pakuyeretsa bwino ndikuwonetsetsa kuti zinthu za substrate zili bwino. Kuwoneka kwa plasma kulinso ndi malire ena. Ngati mphamvu yapitirira malire awa, zinthu za substrate zidzawonongeka. Kuti tichite kuyeretsa bwino ndikuwonetsetsa kuti zinthu za substrate zili bwino, magawo a laser ayenera kusinthidwa malinga ndi momwe zinthu zilili kuti zitsimikizire kuti mphamvu ya kuwala kwa pulse ili pakati pa malire awiri. Mu 2001, JM Lee et al. adagwiritsa ntchito mawonekedwe akuti ma laser amphamvu kwambiri amapanga mafunde a plasma shock akayang'aniridwa, ndipo adagwiritsa ntchito laser ya pulse yokhala ndi mphamvu ya 2.0 J/cm2 (yokwera kwambiri kuposa malire a kuwonongeka kwa ma wafer a silicon) kuti iwalire mofanana ndi wafer ya silicon, ndikutsuka bwino tinthu ta tungsten ta 1 μm tomwe timayamwa pamwamba pa wafer ya silicon. Njira yoyeretsera iyi imatchedwa laser plasma shock wave cleaning, ndipo kwenikweni, laser plasma shock wave cleaning ndi mtundu wa kuyeretsa kwa laser youma. Cholinga choyambirira cha ukadaulo wa laser woyeretsa katatuwu chinali kuyeretsa tinthu tating'onoting'ono pamwamba pa ma wafer a semiconductor. Tinganene kuti ukadaulo woyeretsa laser unayamba ndi chitukuko cha ukadaulo wa semiconductor. Komabe, ukadaulo woyeretsa laser wakhala ukugwiritsidwa ntchito nthawi zonse m'magawo ena, monga kuyeretsa nkhungu ya matayala, kuchotsa utoto wa khungu la ndege, ndi kubwezeretsa pamwamba pa zinthu zakale. Pamene mpweya wopanda mphamvu umatha kuwulutsidwa pamwamba pa substrate. Pamene zodetsazo zichotsedwa pamwamba, zimawulutsidwa nthawi yomweyo pamwamba ndi mpweya kuti zisawononge kuipitsidwanso ndi okosijeni pamwamba.
Thekugwiritsa ntchito ukadaulo woyeretsa laser
1) Mu gawo la semiconductor, kuyeretsa ma wafer a semiconductor ndi ma substrate optical kumaphatikizapo njira yomweyo, yomwe ndi kukonza zinthu zopangira kukhala mawonekedwe ofunikira kudzera mu kudula, kupukuta, ndi zina zotero. Panthawiyi, zinthu zodetsa zimayambitsidwa, zomwe zimakhala zovuta kuchotsa ndipo zimayambitsa mavuto obwerezabwereza oipitsidwa. Zinthu zodetsa pamwamba pa ma wafer a semiconductor zimatha kukhudza mtundu wa kusindikiza kwa circuit board, motero kufupikitsa nthawi ya moyo wa ma semiconductor chips. Zinthu zodetsa pamwamba pa ma optical substrate zimatha kukhudza mtundu wa zipangizo zowunikira ndi zokutira, ndipo zingayambitse kugawa mphamvu kosagwirizana, kufupikitsa nthawi ya moyo. Popeza kuyeretsa kouma pogwiritsa ntchito laser kumatha kuwononga pamwamba pa substrate, njira yoyeretserayi sigwiritsidwa ntchito kwambiri poyeretsa ma wafer a semiconductor ndi ma substrate optical. Kuyeretsa konyowa pogwiritsa ntchito laser ndi laser plasma shock wave kumapindulitsa kwambiri pankhaniyi. Xu Chuanyi ndi anzake adaphunzira za kuyika utoto wapadera wa maginito pamwamba pa ma substrate optical osalala kwambiri ngati filimu ya dielectric, kenako adagwiritsa ntchito laser yopukutidwa kuti ayeretse. Zotsatira zake zinali zabwino, ngakhale kuti chiwerengero cha tinthu tating'onoting'ono tosayera pa gawo lililonse chinawonjezeka, kukula ndi malo ophimbira tinthu tating'onoting'ono tosayera tinachepetsedwa kwambiri. Njirayi imatha kuyeretsa bwino tinthu tating'onoting'ono tosayera pamwamba pa zinthu zosalala kwambiri. Zhang Ping adaphunzira momwe mtunda wogwirira ntchito ndi mphamvu ya laser zimakhudzira zotsatira za zinthu zosiyanasiyana zodetsa tinthu muukadaulo woyeretsera plasma wa laser. Zotsatira zake zoyesera zidawonetsa kuti pa tinthu ta polystyrene tomwe tili pa zinthu zoyendetsera galasi, mtunda woyenera kwambiri wogwirira ntchito wa 240 mJ unali 1.90 mm. Pamene mphamvu ya laser inkawonjezeka, zotsatira zake zoyeretsera zinakula kwambiri, ndipo zinthu zazikulu zodetsa tinthu zinali zosavuta kuyeretsa.
2) Mu gawo la zinthu zachitsulo, kuyeretsa pamwamba pa zinthu zachitsulo n’kosiyana ndi kuyeretsa ma wafer a semiconductor ndi zinthu zowala. Zinthu zodetsa zomwe ziyenera kutsukidwa zili m’gulu la macroscopic. Zinthu zodetsa pamwamba pa zinthu zachitsulo zimaphatikizapo oxide layer (dzimbiri), utoto, zokutira, ndi zina zolumikizira, ndipo zitha kugawidwa m’magulu a zinthu zodetsa zachilengedwe (monga utoto, zokutira) ndi zinthu zodetsa zopanda chilengedwe (monga dzimbiri). Kuyeretsa zinthu zodetsa pamwamba pa zinthu zachitsulo makamaka kumafuna kukwaniritsa zofunikira pakukonza kapena kugwiritsa ntchito, monga kuchotsa pafupifupi 10 μm ya oxide layer pamwamba pa zinthu za titanium alloy musanagwiritse ntchito, kuchotsa utoto woyambirira pamwamba pa khungu panthawi yokonza kwakukulu kuti muthandizire kupoperanso, ndikutsuka nthawi zonse tinthu ta rabara tomwe timalumikizidwa ndi nkhungu ya rabara kuti tiwonetsetse kuti pamwamba pake pali ukhondo komanso ubwino ndi moyo wa nkhungu. Kuwonongeka kwa zinthu zachitsulo n’kokwera kuposa malire a kuyeretsa kwa laser ya zinthu zodetsa pamwamba. Mwa kusankha laser yoyenera, zotsatira zabwino zoyeretsera zitha kupezeka. Ukadaulo uwu wagwiritsidwa ntchito mokhwima m'magawo ena. Wang Lihua ndi anzake adaphunzira momwe ukadaulo woyeretsera laser umagwirira ntchito pochiza zikopa za oxide pamwamba pa aluminiyamu ndi titaniyamu. Zotsatira za kafukufukuyu zasonyeza kuti kugwiritsa ntchito laser yokhala ndi mphamvu ya 5.1 J/cm2 kumatha kuyeretsa wosanjikiza wa oxide pamwamba pa aluminiyamu ya A5083-111H pomwe kumasunga mtundu wabwino wa substrate, ndipo kugwiritsa ntchito laser yoyendetsedwa ndi mphamvu yapakati ya 100 W mwanjira yowunikira kumatha kuyeretsa bwino wosanjikiza wa oxide pamwamba pa aluminiyamu ya titaniyamu ndikuwonjezera kuuma kwa pamwamba pa zinthuzo. Makampani akunyumba monga Ruike Laser, Daqu Laser, ndi Shenzhen Chuangxin apanga zida zoyeretsera laser zomwe zakhala zikugwiritsidwa ntchito kwambiri poyeretsa nkhungu za rabara monga matayala, zigawo za dzimbiri zachitsulo, ndi madontho a mafuta pamwamba pa zigawo.
3) Pankhani ya zinthu zakale zachikhalidwe, kuyeretsa zinthu zakale zachitsulo ndi miyala ndi mapepala ndikofunikira kuti muchotse zinthu zodetsa monga dothi ndi inki zomwe zimawonekera pamwamba pake chifukwa cha mbiri yawo yakale. Zinthu zodetsa izi ziyenera kuchotsedwa kuti mubwezeretse zinthu zakalezo. Pa ntchito za mapepala monga calligraphy ndi zojambula, zikasungidwa molakwika, nkhungu imakula pamwamba pake ndikupanga madontho. Madontho awa amakhudza kwambiri mawonekedwe oyambirira a pepalalo, makamaka pa pepala lomwe lili ndi phindu lalikulu la chikhalidwe kapena mbiri yakale, zomwe zidzakhudza kuyamikira ndi kuteteza kwake. Zhao Ying ndi anzake adaphunzira kuthekera kogwiritsa ntchito laser ya ultraviolet kuyeretsa madontho a nkhungu pa mapepala. Zotsatira za kafukufukuyu zidawonetsa kuti kugwiritsa ntchito laser yokhala ndi mphamvu ya 3.2 J/mm2 kusanthula kamodzi kumatha kuchotsa madontho oonda, ndipo kusanthula kawiri kumatha kuchotsa madonthowo kwathunthu. Komabe, ngati mphamvu ya laser yomwe imagwiritsidwa ntchito ndi yokwera kwambiri, idzawononga mpukutu wa pepala pochotsa madonthowo. Zhang Xiaotong ndi anzake adabwezeretsa bwino chinsalu cha bronze chokongoletsedwa ndi gilded pogwiritsa ntchito njira ya laser vertical irradiation liquid film. Zhang Licheng ndi anzake. anagwiritsa ntchito ukadaulo woyeretsa pogwiritsa ntchito laser pokonzanso chifaniziro cha akazi cha m'miphika chojambulidwa ndi mafumu a Han. Yuan Xiaodong ndi ena anaphunzira momwe ukadaulo woyeretsa pogwiritsa ntchito laser umakhudzira kuyeretsa zinthu zakale za miyala ndipo anayerekeza kuwonongeka kwa thupi la miyala ya mchenga isanayambe kutsukidwa ndi itatha kutsukidwa, komanso momwe utoto umatsukidwira chifukwa cha madontho a inki, kuipitsa utsi, ndi kuipitsa utoto.
Pomaliza: Ukadaulo woyeretsa laser ndi njira yapamwamba kwambiri, yokhala ndi kafukufuku wochuluka komanso mwayi wogwiritsa ntchito m'magawo olondola kwambiri monga ndege, zida zankhondo, ndi uinjiniya wamagetsi ndi zamagetsi. Pakadali pano, ukadaulo woyeretsa laser wagwiritsidwa ntchito bwino m'malo ena, chifukwa cha magwiridwe ake abwino, osawononga chilengedwe, komanso magwiridwe antchito abwino kwambiri oyeretsa. Malo ogwiritsira ntchito ake akukulirakulira pang'onopang'ono. Kukula kwa ukadaulo woyeretsa laser sikunagwiritsidwe ntchito mokwanira m'malo monga kuchotsa utoto ndi kuchotsa dzimbiri, komanso pakhala malipoti oti laser yagwiritsidwa ntchito kuyeretsa wosanjikiza wa oxide pa waya wachitsulo m'zaka zaposachedwa. Kukula kwa malo ogwiritsira ntchito omwe alipo komanso chitukuko cha malo atsopano ndiye maziko a chitukuko cha ukadaulo woyeretsa laser. Kafukufuku ndi chitukuko cha zida zatsopano zotsukira laser ndi chitukuko cha zida zatsopano zotsukira laser zidzawonetsa kusiyana, zomwe zimapangitsa kuti pakhale ntchito zosiyanasiyana. M'tsogolomu, kukwaniritsa kuyeretsa laser kwathunthu kudzera mu mgwirizano ndi maloboti amafakitale nakonso kungatheke. Kukula kwa ukadaulo woyeretsa laser ndi motere:
(1) Kulimbitsa kafukufuku wokhudza chiphunzitso choyeretsa pogwiritsa ntchito laser kuti atsogolere kugwiritsa ntchito ukadaulo woyeretsa pogwiritsa ntchito laser. Pambuyo pofufuza zikalata zambiri, zapezeka kuti palibe njira yokhwima yophunzitsira pogwiritsa ntchito laser, ndipo maphunziro ambiri amachokera ku zoyeserera. Kukhazikitsa njira yophunzitsira pogwiritsa ntchito laser ndiye maziko a chitukuko ndi kukhwima kwa ukadaulo woyeretsa pogwiritsa ntchito laser.
(2) Kukulitsa minda yomwe ilipo kale komanso minda yatsopano yogwiritsira ntchito. Ukadaulo woyeretsa pogwiritsa ntchito laser wagwiritsidwa ntchito bwino m'malo monga kuchotsa utoto ndi kuchotsa dzimbiri, ndipo pakhala malipoti akuti kugwiritsa ntchito laser kuyeretsa wosanjikiza wa oxide pa waya wachitsulo m'zaka zaposachedwa. Kukula kwa minda yomwe ilipo kale komanso chitukuko cha minda yatsopano ndi nthaka yachonde yopangira ukadaulo woyeretsa pogwiritsa ntchito laser.
(3) Kafukufuku ndi chitukuko cha zida zatsopano zoyeretsera ndi laser. Kupanga zida zatsopano zoyeretsera ndi laser kudzawonetsa kusiyana. Mtundu umodzi ndi zida zomwe zimakhala ndi ntchito zosiyanasiyana zomwe zimaphimba malo ambiri ogwiritsira ntchito, monga chipangizo chimodzi chomwe chingakwaniritse ntchito zochotsa utoto ndi kuchotsa dzimbiri nthawi imodzi. Mtundu wina ndi zida zapadera pazosowa zinazake, monga kupanga zida zinazake kapena ulusi wa kuwala kuti zikwaniritse ntchito yoyeretsera zinthu zodetsa m'malo ang'onoang'ono. Kudzera mu mgwirizano ndi maloboti amakampani, kuyeretsa ndi laser kokha ndi njira yotchuka yogwiritsira ntchito.
Nthawi yotumizira: Julayi-17-2025
